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Friday, July 31, 2020 | History

4 edition of Vibration control in microelectronics, optics, and metrology found in the catalog.

Vibration control in microelectronics, optics, and metrology

4-6 November 1991, San Jose, California

  • 207 Want to read
  • 29 Currently reading

Published by SPIE in Bellingham, Wash .
Written in English

    Subjects:
  • Optical instruments -- Vibration -- Congresses.,
  • Vibration -- Measurement -- Congresses.

  • Edition Notes

    Includes bibliographical references and index.

    StatementColin G. Gordon, chair/editor ; sponsored and published by SPIE--the International Society for Optical Engineering.
    SeriesProceedings / SPIE--the International Society for Optical Engineering ;, v. 1619, Proceedings of SPIE--the International Society for Optical Engineering ;, v. 1619.
    ContributionsGordon, Colin G., Society of Photo-optical Instrumentation Engineers.
    Classifications
    LC ClassificationsQC370.5 .V53 1992
    The Physical Object
    Paginationix, 369 p. :
    Number of Pages369
    ID Numbers
    Open LibraryOL1752536M
    ISBN 100819407577
    LC Control Number92080102

      Platus DL () Negative-stiffness-mechanism vibration isolation systems. In: Vibration Control in Microelectronics, Optics, and Metrology, International Society for Optics and Photonics, vol , pp 44–55 Google ScholarAuthor: Godfrey Keung, Chao Chen. D.L. Platus, Negative-stiffness-mechanism vibration isolation systems, SPIE proceed-ings, Vibration Control in Microelectronics, Optics, and Metrology , 44 () Vibration of Structures and.

    Passive Vibration Isolation It emphasizes proven, effective techniques that are not yet widely used on equipment for microelectronics, MEMS, and nanotechnology, as well as process plants, power generation, oil, gas, petrochemicals, and other industries. Vibration isolation is a vibration control technique in which the source of Cited by: Metrology is the science of measurement. In today's world, there are various tools and technologies at our disposal for measuring an entity. Being such a broad field consisting of numerous.

    New Low-Height, Low-Frequency Vibration Isolation Platform Adapts To Space Constraints In Critical Micro- And Nano-Microscopy At just /4 inches in height, while isolating vibrations as low as 1 hertz, the new completely-passive Negative-Stiffness tabletop vibration isolation platform – developed by Minus K Technology – provides the industry's thinnest low-height, low-frequency isolator. Vibration isolation tables find application in diverse production and research environments. The structure of a table is such that a designer is forced to compromise among design metrics such as transmissibility, force-disturbance rejection, and controller by: 8.


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Vibration control in microelectronics, optics, and metrology Download PDF EPUB FB2

Stanford Libraries' official online search tool for books, media, journals, databases, government documents and optics. Vibration control in microelectronics, optics, and metrology: NovemberSan Jose, California in SearchWorks catalog.

Vibration control in microelectronics, optics, and metrology; Proceedings of the Meeting, San Jose, CA, Nov.Gordon, Colin G. Abstract. Attention is given to passive and active systems for vibration isolation; standards and control of vibration-sensitive equipment; design of low-vibration facilities; soil, foundation, and floor design Author: Colin G.

Gordon. Part of the CISM Courses and Lectures book series (CISM, volume ) Abstract. The Negative-stiffness-mechanism vibration isolation systems. Vibration Control in Microelectronics, Optics, and Metrology, 44, Google Scholar.

E.I. Rivin. Vibration isolation of precision objects. SPIE Vol. Vibration Control in Microelectronics, Optics, end Metrology ") / 47 As the net stiffness K is reduced by the NSM, the maximum elastic energy stored during the cycle, and associated with 6, is diminished, but the energy dissipated per cycle is not diminished.

The energy dissipated per cycle is the energy dissipated by. Recent advancements in passive and active vibration control systems Author: K. Peter Heiland Subject: Recent advancements in passive and active vibration control systems Keywords: Recent advancements in passive and active vibration control systems Created Date: 1/12/ PM.

Proceedings SPIEVibration Control in Microelectronics, Optics, and Metrology, San Jose, CA, Nakamura Y., Nakayama M., Masuda K. Development of active six-degree-of-freedom micro-vibration control system using hybrid actuators comprising air actuators and giant magnetostrictive actuators.

Smart Mater Structures, Vol. 15, Issue 4 Author: Xiaoping Zhang, Lin He. Design for vibration control in microelectronics facilities Design for vibration control in microelectronics facilities Anderson, Roger ABSTRACT This presentation reviews the evolution of the microelectronics industry in terms of sophistication of facility requirements as reâ lated to process equipment and the ever decreasing size of circuit features into the present subâ Author: Anderson, Roger.

Neil Moiseev, Proc. SPIE — The Int. Soc. for Optical Engineering, Vol. (Vibration Control in Microelectronics, Optics, and Metrology), published by Int.

Soc. for Optical Engineering, Bellingham, WA, edited by Colin G. Gordon,p. N il W^-VïO VI V~) (SOf^l '-»o\ t— t^ t~- m •— n t~- M S •'"(Nm M " •^»a m rQ X Cited by: Download Engineering Metrology and Measurements By Raghavendra,‎ Krishnamurthy – Engineering Metrology and Measurements is a textbook designed for students of mechanical, production and allied disciplines to facilitate learning of various shop-floor measurement techniques and also understand the basics of mechanical measurements.

With a conventional introduction to the principles and. Download Engineering Metrology and Measurements Books – We have compiled a list of Best & Standard Reference Books on Engineering Metrology and Measurements Subject.

These books are used by students of top universities, institutes and colleges. Engineering Metrology and Measurements is a textbook designed for students of mechanical, production and allied disciplines to facilitate. This presentation reviews the evolution of the microelectronics industry in terms of sophistication of facility requirements as related to process equipment and the ever decreasing size of circuit features into the present sub-micron by: 1.

Get this from a library. Vibration control in microelectronics, optics, and metrology: NovemberSan Jose, California. [Colin G Gordon; Society of Photo-optical Instrumentation Engineers.;].

Get this from a library. Vibration control in microelectronics, optics, and metrology: NovemberSan Jose, California. [Colin G Gordon; Society of. Negative-stiffness-mechanism vibration isolation systems Author: David L.

Platus Subject: Negative-stiffness-mechanism vibration isolation systems Keywords: Negative-stiffness-mechanism vibration isolation systems Created Date: 1/12/ PM. Vibration Control in Microelectronics, Optics, and Metrology: November San Jose, California (Proceedings of Spie) n/a Published by Society of Photo Optical ().

Proc. SPIEVibration Control in Microelectronics, Optics, and Metrology, pg (1 February ); doi: / Read Abstract + This paper describes a floor monitoring system utilizing a PC that continuously monitors very low levels of vibration and warns the user of possible " vibration contamination" that might result.

This paper addresses the design of several types of floors for low-vibration environments, drawing from some of the authors'' design projects. Paper Details Date Published: 1 February PDF: 12 pages Proc. SPIEVibration Control in Microelectronics, Optics, and Metrology, (1 February ); doi: / Date Published: 1 February PDF: 11 pages Proc.

SPIEVibration Control in Microelectronics, Optics, and Metrology, (1 February ); doi: / Show Author Affiliations David L. Platus, Minus K Technology (United States). Jennings P.A., Willson J.W. and Bannister R.H. Improved vibration isolation system for a scanning electron microscope Vibration Control in Microelectronics, Optics, and Metrology.

International Society for Optics and Photonics. Crossref Google Scholar. Thin polycarbonate strips were used in the experiments. The specific weight was kN / m 3 and Young's modulus was GPa.

The strips were mm wide and mm thick, giving a nondimensional parameter value a = The ends of each strip were clamped, and the base was attached to the shaker (MB Dynamics PM50A Vibration Exciter) that moved vertically, as shown in Cited by:. Colin G. Gordon, “Generic Criteria for Vibration-Sensitive Equipment,” Vibration Control in Microelectronics, Optics and Metrology, SPIE Proceedings.

For many areas of acoustics, standards organizations or regulatory bodies have mandated vibration or noise criteria and defined the appropriate processing methods. No such standards exist for vibration-sensitive facilities at this time except as defined by equipment manufacturers, facility owners, and/or vibration consultants.

The existing criteria from these groups differ widely in by: [4] W. Rockwood, Study of ground effects on building foundation vibration using two-dimensional real-mode finite element analysis, Proc.

SPIEVibration Control in Microelectronics, Optics, and Metrology, (). DOI: /Author: Andrei Craifaleanu, Cristian Dragomirescu, Nicolaie Orăşanu, Adrian Costache.